| Grade |
Lot Diameter Variation (Vdwl, um) |
Gauge Interval (um) |
Preferred Gauge (um) |
Subgauge Interval (um) |
Subgauge (um) |
| 3 |
0.13 |
0.5 |
-5,......,-0.5,0,+0.5,......+5 |
0.1 |
-0.2,-0.1,0,+0.1,+0.2 |
| 5 |
0.25 |
1 |
-5,......-1,0,+1,......,+5 |
0.2 |
-0.4,-0.2,0,+0.2,+0.4 |
| 10 |
0.50 |
1 |
-9,......,-1,0,+1,......,+9 |
0.2 |
-0.4,-0.2,0,+0.2,+0.4 |
| 16 |
0.80 |
2 |
-10,......,-2,0,+2,......+10 |
0.4 |
-0.8,-0.4,0,+0.4,+0.8 |
| 20 |
1.0 |
2 |
-10,......,-2,0,+2,......+10 |
0.4 |
-0.8,-0.4,0,+0.4,+0.8 |
| 24 |
1.2 |
2 |
-12,......,-2,0,+2,......+12 |
0.4 |
-0.8,-0.4,0,+0.4,+0.8 |
| 28 |
1.4 |
2 |
-12,......,-2,0,+2,......+12 |
0.4 |
-0.8,-0.4,0,+0.4,+0.8 |
| 40 |
2.0 |
4 |
-16,......,-4,0,+4,......+16 |
0.8 |
-1.6,-0.8,0,+0.8,+1.6 |
| 60 |
3.0 |
6 |
-20,......,-5,0,+5,......+20 |
1 |
-2,-1,0,+1,+2 |